XBS

XBS

A system for multiple source monitoring in MBE deposition applications

Molecular beam sources require accurate control for reproducible production quality thin film growth. Hiden’s XBS (cross beam source) system provides in-situ monitoring of multiple sources with real-time signal output for precise control of the deposition. Hiden’s XBS is a great tool used in molecular beam mass spectrometry.

🛑 Overview

The Hiden XBS RC system is a quadrupole mass spectrometer designed for monitoring multiple beam sources simultaneously, and uniquely offers beam acceptance through a 70 ° cone, transverse to the quadrupole axis.

 Beam acceptance apertures are configured individually for each specific process chamber source position, manufactured as replaceable plug-in elements to enable retrospective modification in event of chamber alteration.

The high sensitivity and fast data acquisition of the XBS system provide signals for control of growth rates from 0.01 Angstrom per second.

🛑 Features

• High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu

• Enhanced long-term Stability (less than ± 0.5% height variation over 24 h)

• Crossbeam ion source, beam acceptance through +/- 35 ° to transverse axis

• Ion source control for soft ionization and appearance potential mass spectrometry

• Enhanced sensitivity for high mass transmission, Automatic mass scale alignment

• 2mm beam acceptance aperture - configured to specific user application

• Enhanced contamination resistance via the RF-only pre-filter stage

• Integral UHV compatible water-cooled shroud

• Detection limits down to 30 ions / second in molecular beam studies

• Monitor growth rates of 1Å / minute and lower

• Windows ™ based MASsoft control via RS232, USB or Ethernet LAN

🛑 Applications

• MBE monitoring and control

• Molecular beam studies

• Multiple beam source analysis

• High performance RGA

• Desorption

• Outgassing studies

• Bakeout cycles

• Process gas contaminants