ESPion

ESPion

An advanced Langmuir probe for plasma diagnostics

Routine monitoring of the I-V plasma characteristic by the Hiden ESPion probe gives direct information relating to plasma stability and reproducibility. Automatic real-time extrapolation of plasma parameters gives detailed information on plasma properties for use in characterization and uniformity monitoring.

🛑 Overview

The ESPion system employs Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard plasma analysis models.

The Hiden automatic Z-drive provides for spatially resolved measurements across the plasma volume. The standard Z-drive translation options are: 300, 600 and 900 mm.

🛑 Features

• 15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analysis

• Hide pioneers in passive RF compensation

• ESPion has the highest blocking impedance of any commercially available unit

• 4.25MOhm at 13.56 MHz cf. 100kOhm

• Gas cooled multi-inductor chain for high temperature plasma operation

• Gas cooled multi-inductor chain is user replaceable for tuning to other frequencies

• Reference probe compensates for low frequency effects

• e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply)

• ESPion the fastest pulsed plasma specifications of any commercial probe

• ESPionSoft contains all necessary gating circuitry as standard

• 300, 600 or 915mm auto linear drive options

• Interlocked isolation valve, 90 ° probes, combined linear - rotary drives options available

• Self-cleaning cycle to limit probe tip contamination

• ESPionSoft control via RS232, RS485 or Ethernet LAN

🛑 Applications

• Plasma characterization

• Plasma potential

• Floating potential

• Electron temperature

• Ion density

• Electron energy distribution

• Ion flux