EQS SIMS Analyser

EQS (Εlectrostatic Quadrupole)

A system for the analysis of secondary positive and negative ions from solid samples

Hiden Analytical supplies world-class mass spectrometry solutions and innovative tools for ion analysis, including the tried-and-trusted Hiden EQS. This high transmission electrostatic quadrupole secondary ion mass spectrometer (SIMS) is one of our most popular detection systems for research-scale thin film nanoscale surface analysis. The EQS SIMS analyzer is an ideal add-on analyzer for XPS and focused ion beam FIB microscopy systems.

🛑 Overview

The Hiden EQS is a unique electrostatic quadrupole SIMS detector, specialized for the mass spectral analysis of both positive (+ ve) and negative (-ve) secondary ions from solid samples. With its integrated 45 ° electrostatic sector ion energy analyzer, the Hiden EQS can simultaneously analyze ion energy with a resolution of 0.2 electron volts (eV). This makes it one of the most versatile tools for ion analyzers in a raft of mass spectrometry applications, including:

• Extending the sensitivity range of XPS by a factor of over 1000

• Dynamic and static SIMS

• Focussed ion beam (FIB) mass spectrometry

• Secondary neutral mass spectrometry (SNMS)

• Sputter depth profiling

• Sputtered ion and neutral mass / energy analysis

Tools for Ion Analysis from Hiden Analytical

A popular bolt-on fitting for after-market systems, ideal as an add-on for XPS systems and focused ion beam FIB microscopy systems for example, the Hiden EQS offers high sensitivity and optional differential pumping to meet the imaging, depth profiling, and mass spectra requirements of users in a range of applications.

🛑 Features

• High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range

• Raster Control for enhanced depth profiling and imaging with integrated signal gating

• 45 ° Electrostatic Sector analyzer, scan energy at 0.05 eV increments / 0.25eV FWHM

• Minimum perturbation of ion flight path & constant ion transmission at all energies

• Quadrupole Triple filter, mass options up to 5000 amu

• Penning Gauge and interlocks to provide over pressure protection

• Differentially pumped option for use in high pressure environments

• MASsoft control via RS232, RS485 or Ethernet LAN

• Easily interfaced to existing systems

🛑 Applications

• Surface Analysis

• Thin film & surface engineering

• Catalysis