HALO 201 MBE

HALO 201 MBE

A gas analysis system for molecular beam epitaxy applications

The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.

🛑 Overview

The MBE specific analyzer is constructed from compatible materials and designed for prolonged use in MBE environments and includes, as standard, molybdenum wiring in place of copper and a contamination resistant ion source shroud.

🛑 Features

• Molybdenum wiring in place of copper wiring to improve RGA system lifetime in MBE environments

• Contamination resistant ion source shroud

• Dual Faraday/channel plate electron multiplier

• Minimum detectable partial pressure to 2 x 10-13 mbar

• Thermal extender option for RGA operation during bakeout

🛑 Applications

• Semiconductor production