HAL 201 RC

HAL 201 RC

A residual gas analyzer configured for demanding UHV applications

The Hiden RGA for UHV are designed and configured for residual gas analysis in demanding UHV applications where critical measurements at UHV are required.

🛑 Overview

 The HAL 201 RC analyzer features vacuum fired ion sources as standard, treated using Hiden''s proprietary vacuum annealing process. The vacuum annealed ion source minimizes outgassing, for superior background measurement performance in demanding UHV applications where total pressure is < 5 x 10-10 mbar.

EPICS is the standard instrument control software used in many light sources around the world and the Hiden HAL system is fully compatible with EPICS software drivers.

🛑 Features

• Vacuum fired ion sources to minimize source outgassing

• Electron impact ioniser with twin oxide coated Iridium filament

• Dual Faraday/channeltron electron multiplier detector

• Minimum detectable partial pressure of 5 x 10-14 mbar

• Maximum operating pressure of 1 x 10-4 mbar

🛑 Applications

• Residual gas analysis

• Leak detection

• desorption

• Outgassing studies

• Bakeout cycles

• Pump performance

• Process gas contaminants