Modular SIMS

Modular SIMS

Add high performance SIMS capability to your surface analysis chamber

Hiden’s Modular SIMS system adds SIMS analysis to vacuum chambers via a DN-150-CF flange.

The Modular SIMS is a complete SIMS instrument on a single flange (DN150mm and greater) combining an ion gun, EQS spectrometer, electron gun, light and camera module and retractable sample current monitor.

Overview

Hiden’s Modular SIMS system adds SIMS analysis to vacuum chambers via a DN-150-CF flange.

The Modular SIMS is a complete SIMS instrument on a single flange (DN150mm and greater) combining an ion gun, EQS spectrometer, electron gun, light and camera module and retractable sample current monitor.

The Modular SIMS is designed for fast and easy characterization of layer structures, surface contamination and impurities with sensitive detection of positive and negative ions being assisted by the gas primary ion beam and provides isotopic sensitivity across the entire periodic table. It is one of our most simple and easy to use SIMS instrument, it has many of the features available on the highest specification instruments, such as nanometer depth resolution. Making it ideal for the research of thin films, corrosion studies and metallic species.

Features

• Custom systems use standard UHV components

• Software package mirrors that used with all Hiden SIMS systems

• 3D characterization

• Nanometer depth resolution

• Integration with third party ion guns, electron guns, XPS, other instruments

• Full 3D CAD design and modeling

• Experience in both research and production integration

Applications

• Failure Analysis

• Optical and Engineering Coatings

• Fuel Cell and Battery Technology

• Metallurgy

• Semiconductors

• Corrosion and Tribology

• Materials Science