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AutoSIMS

AutoSIMS 

Automatic Surface Analysis System

 

Hiden Analytical has developed a fully self-contained automatic surface analysis system in the AutoSIMS, an innovative secondary ion mass spectrometer (SIMS) that can perform routine and repetitive analysis with unattended operation. With a fully-automated X-Y stage and expanded holder, the AutoSIMS by Hiden can run hundreds of processes a day during uninterrupted 24/7 operation.

 

🛑 Overview

Hiden Analytical specializes in SIMS instruments for nanoscale depth profiling and quantitative surface analysis of myriad different sample types, from comprehensive workstations to compact SIMS solutions. The AutoSIMS comprises the same long-life oxygen-source primary ion gun and MAXIM analyzer found throughout the Hiden SIMS product line, with the addition of a modular cassette sample holder and a software-driven X-Y sample stage. This provides the basis for high-reliability detection of relevant surface spectra and three-dimensional (3D) depth profiles without human intervention.

The long service life of the ion gun ensures a consistent high-stability beam is generated throughout extended periods of operation, allowing the cassette holder and sample stage to deliver continuous sample doses for high throughput batch analysis. Even novice operators can program the automatic surface analysis system by tweaking the matrix of experimental parameters through a simple spreadsheet.

AutoSIMS by Hiden Analytical

The AutoSIMS automatic surface analysis system by Hiden can perform both static and dynamic SIMS analysis with nanometer depth resolution, with complete independence. It can also be run in manual mode for expert users looking to exploit the full raft of technical possibilities available to them.

 

🛑 Features

• Fully automated, unattended, SIMS analysis

• Large X-Y sample stage

• Oxygen ion gun for sensitive analysis

• Customizable cassette style sample holder

• Parameters can be specified via spreadsheet

• 3D characterization

• Nanometer depth resolution

• Modular servicing for high up-time

 

🛑 Applications 

• Thin Films

• Surface Modification

• Coatings

• Product Monitoring

• Repetitive Analysis

• Large Areas

• Multiple regions

• CVD / MOCVD / ALD 

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